|
STRAIGHT-line
|
Typ 100
|
Typ 150
|
Typ 200
|
|
Overall dimensions Length
|
120 mm
|
170 mm
|
190 mm
|
|
Depth
|
110 mm
|
170 mm
|
230 mm
|
|
Height
|
85 mm
|
115 mm
|
115 mm
|
|
Required guide surface area horizontal
lateral
|
100 mm
60 mm
|
145 mm
75 mm
|
195 mm
75 mm
|
|
Vacuum air-bearings topface
|
4
|
3 or 4
|
4
|
|
Mass
|
1200 g
|
2550 g
|
4200 g
|
|
Vacuum suction force horizontal
vertical
|
> 70 N
>120 N
|
> 200 N
> 220 N
|
> 220 N
> 270 N
|
|
Standard repetition accuracy**
|
0.30 μm
|
0.30 μm
|
0.30 μm
|
|
Ultra-precision (optional) **
|
0.05 μm
|
0.05 μm
|
0.05 μm
|
|
Maximum edge bevelling
|
5 mm
|
7 mm
|
7 mm
|
|
Air unit SA-100
|
5-10 bar
<40 l/min
|
5-10 bar
<40 l/min
|
5-10 bar
<40 l/min
|
|
Optimally motorization intern
extern
|
no
yes
|
Yes
yes
|
Yes
yes
|
