|
Type
|
XY Linear System LT-100
|
|
Dimensions
|
350 / 300/ 130 mm
|
|
Weight
|
15 kg
|
|
Travel X/Y
|
120 / 70 mm
|
|
Straightness
|
0.3 µm / 50 mm
|
|
Squareness
|
0.3 µm / 50 mm
|
|
Flatness
|
0.1 µm / 50 x 50 mm
|
|
Air bearing noise
|
0.01 µm
|
|
Positioning accuracy
|
0.1 µm
|
|
Repeatability
|
0.02 µm
|
|
|
|
|
Other dimensions and accuracies on request
|
|
